ClassOne Equipment Brings Advanced 300 mm Takano Particle Detection System to EUV Tech


First Class Equipment (, announced the delivery of the new state-of-the-art Takano WM-10 particle measurement system to EUV Tech, a global leader in metrology equipment for the manufacturing of state-of-the-art EUV chips. The announcement was made by ClassOne Equipment Vice President, David Pawlak, and EUV Tech Vice President R&D, Matt Hettermann.

Image Credit: First Class Equipment

hetterman said, “A key factor in the selection of our new Takano WM-10 300 mm system was its extremely high sensitivity particle detection. For us, particle sensitivity is very important because we use the new Takano tools to validate the cleanliness of the equipment we build – which are some of the most advanced EUV and soft-x-ray systems in the industry.”

“We have a new WM-10 running at our factory in Martinez, California,” Hettermann added. “And we’ve seen the incredible performance it delivers – routinely detecting particles down to 48 nm. Plus, it’s configured to handle not only 300mm but also 200mm and 150mm wafers.”

Pawlak points out that the Takano brand particle detection system is one of the best-selling new devices in the ClassOne Equipment product line. Along with best-in-class detection sensitivity, Takano equipment provides high throughput, repeatability, and reliability, plus a range of options. And most importantly, these systems are attractively priced and readily available. These are also some of the reasons why Takano is the choice to replace the new technology for the old Surfscan® system, which for many years was the industry “standard” for wafer particle detection.

ClassOne Equipment is the exclusive source for sales, service and support of the complete Takano brand particle detection system throughout North America and Europe. ClassOne maintains a team of specially trained field engineers to provide installation, PM and all other services on the Takano system.

In addition to the all-new Takano system, ClassOne Equipment also offers a wide selection of pre-owned semiconductor equipment, including many devices that are completely refurbished and truly better than new. The company also provides thousands of high-quality OEM parts, as well as equipment service, support, warranty, financing and more.



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