New Nanopositioning and Ultra-Precision Motion Control System


Booth San Francisco, CA – PI #5678 at Semicon West 2023 will feature new high precision multi-axis wafer stage along with air cushion stages for wafer stealth dicing, precision direct drive gantry stages, and high speed beam steering systems for laser beam delivery. For applications such as surface metrology, fast focus stages are available with a choice of piezo motors and voice coils.

​​​​​​​​​​Image Credit: PI (Physical Instruments) LP

The high-precision solutions of PI and motion systems find applications in nano-lithography, laser optics, mask inspection, CD measurement, wafer inspection and metrology, and wafer dicing. PI focuses on global growth markets such as Semiconductor ManufacturingSilicon Photonics, Quantum Computing, Industrial Automation, High Resolution Microscopy, and Life Sciences.

Can’t get to San Francisco? You can see a variety performance automation for semicon, photonics, and nanopositioning applications covered by PI system technology.

Another way to learn about the latest motion control technology is to sign up for one of our precision motion design webinars at this URL:

About PI

PI is a global leading private company that designs and manufactures world-class precision motion and automation sub-systems for semiconductor test, metrology, photonics and other high-tech applications. The company was founded in 1970 and currently employs more than 1700 people worldwide.


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